Frontside particle inspection： Particle Pellicle Side：Particle、破洞、針孔 Pellicle frame ： Particle Glass side ： Particle Through-pellicle inspection ： Particle
1.Both side inspection without flipping mask 2.Particle size categorization 3.Particle/defect management before & after exposure 4.OHT support 5.Class 1 cleanliness 6.SECS/GEM support
