1. INDEX
  2. PRODUCT
  3. Automated Optical Inspection
  4. Equipment-Reticle
Mask AOI Aurora-D
Mask AOI Aurora-D
MASK AOI Front side ： Particle Pellicle Side： Particle, scratch, pinhole Glass Side: Particle, scratch, water mark, contamination Pellicle frame ： Particle
Feature
1. Capability: Pellicle/glass side particle: >5um
                  Pellicle frame : Particle >15um
2. Both side inspection without flipping mask
3. Particle size categorization
4. Particle/defect management before & after exposure
5. OHT support
6. Class 1 cleanliness
7. SECS/GEM support
Pellicle side
Glass side
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