Mask AOI Basic D-02
Mask AOI Basic D-02
Glass Side Particle, water mark, contamination Pellicle Side Particle, scratch, pinhol
Feature
1. Capability：>30um particle inspection
2. SFO Unique surface optics technology
3. Both side inspection without flipping mask
4. Particle size categorization
5. Particle/defect management before & after exposure
6.Class 1 cleanliness
7. SECS/GEM support
Pellicle side
Glass side
