CELL AOI
CELL AOI
Cell Process:CELL AOI (Cell Surface Inspection) Scratch, contamination, crack, chipping, dimple, pimple, etc.
Feature
1. High Resolution Camara
2. ADC with high algorithm to avoid over killer
3. Improved Scratch/Dimple Line classification
4. Efficient defect capture and images management
5. Efficient SW Calculation & inspection
6. Intuitive Human Machine Interface with flexible & customized design
Pellicle side