Wafer AOI Wafer Size : Customize Wafer Type : Whole wafer / Diced wafer / blank wafer Wafer Inspection : Particles, scratches, dirt, burrs, cracks, pits
1.Resolution ：0.7um/pixel 2.Particle size categorization 3.Auto Defect Classification 4.OHT support 5.Class 1 cleanliness 6.SECS/GEM support
