1. Capability： Pellicle/glass side/ Inner side wall  particle --15um
                     Pellicle/glass side review system—2.4um/pixel
2. SFO Unique surface optics technology
3. Both side inspection without flipping mask
4. Particle size categorization
5. Particle/defect management before & after exposure
6.Class 1 cleanliness
7. SECS/GEM support
8. OHT support