Mask AOI Basic D-02C
Mask AOI Basic D-02C
MASK AOI
Glass Side： Particle, scratch, water mark, contamination
Pellicle Side： Particle, scratch, pinhole
Feature
1. Capability：>30um particle inspection
2. SFO Unique surface optics technology
3. Both side inspection without flipping mask
4. Particle size categorization
5. Particle/defect management before & after exposure
6.Class 1 cleanliness
7. SECS/GEM support
Pellicle side
Glass side
